Recent Submissions

  • Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication 

    Khakifirooz, Marzieh; Chien, Chen-Fu; Fathi, Mahdi (IEEE Transactions on Automation Science and EngineeringDepartment of Industrial and Systems EngineeringJames Worth Bagley College of Engineering, 2019-02-19)
    It is vital to have an exclusive modification in semiconductor production process because of meeting differentiated customer demands in dynamic and competitive global minuscule semiconductor technology market and the highly ...